Series Production
We are a globally integrated design, development and series production partner for your additively manufactured components.
Revolutionizing Semiconductor Equipment Manufacturing
Unlocking Efficiency and Precision with Additive Manufacturing
Additive Manufacturing is a game-changer for capital equipment manufacturers in the semiconductor industry, delivering immediate benefits. With AM's design flexibility and seamless transition from prototyping to customized part production, capital equipment manufacturers experience a significant advantage.
The improved thermal management of critical components like wafer tables, results in enhanced equipment accuracy, speed, and overall lifecycle value. Another key application involves optimizing fluid flow within complex manifolds. 3D printing technologies also offer structural optimization with lightweight, high-strength components, improving the strength-to-weight ratio, corrosion resistant materials, and time-to-market. Moreover, AM simplifies manufacturing, eliminating the need for labor-intensive brazing and multipart assemblies.
Applications and benefits
1. Enhanced Thermal Management
AM improves accuracy by 1–2 nm while boosting machine speed and uptime. Optimized internal cooling channels and surface patterns reduce temperature fluctuations and reduce time constants.
2. Streamlined Manufacturing
AM eliminates the need for brazing and multipart assemblies, reducing part count and labor costs. This results in more reliable wafer tables.
3. Fluid Flow Optimization
Complex fluid manifolds produced with AM offer reduced pressure drops, decreased disturbances, and improved accuracy by 1–2 nm.
4. Structural Optimization
AM allows for lightweight, high-strength parts, improving performance and reducing system vibration.
Why choose Oerlikon AM as your partner?
- Global manufacturing capabilities meeting the needs of semiconductor supply chain
- Materials developed specifically for the semiconductor industry (corrosion resistant)
- Surface post processing know-how targeted for semiconductor needs including coatings
- Experience with cleaning processes meeting semiconductor manufacturing requirements
